By Humberto Campanella
This groundbreaking booklet will give you a accomplished knowing of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical process) resonators. For the 1st time at any place, you discover huge insurance of those units at either the know-how and alertness degrees. This useful reference provides you with tips in layout, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the mixing of those units with ordinary CMOS (complementary-metal-oxide-semiconductor) applied sciences, and their program to sensing and RF platforms. in addition, this one-stop source appears on the major features, changes, and barriers of FBAR, MEMS, and NEMS units, supporting you to decide on the best methods on your initiatives. Over 280 illustrations and greater than one hundred thirty equations aid key issues during the publication.
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Extra info for Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems)
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